Chrome Mask for UIUC ECE
One chrome mask on a 5x5" 90mil 2um-flatquartz substrate. CD will be a 0.5um dark line with a tolerance of 100nm. 150nm registration tolerance to grid. Zero defects greater than 5um. 3-4 days manufacturing lead-time and FedEx 2-day Shipping included.
Your mask order will be released to manufacturing on your approval of the proofs shown here and receipt of order. As shown, COLOR represents OPAQUE CHROME, WHITE represents TRANSPARENT GLASS and orientation is CHROME-DOWN, looking through the glass.
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