Chrome Masks for UNC-Charlotte
Two chrome masks on 5x5" 90mil amorphous fused-silica (quartz), 1um-flat substrates. Minimum CD 0.5um with 50nm tolerance and uniformity, 5nm resolution, and 75nm registration to an NIST-traceable grid. Dry etch process for excellent line-edge fidelity and CD targeting. Custom design to specification of hexagonal lattices that are on-grid and will not snap. Your mask order will be released to manufacturing on your approval of the proofs shown here and receipt of order. As shown, WHITE represents OPAQUE CHROME, COLOR represents TRANSPARENT GLASS and orientation is CHROME-DOWN, looking through the glass. To view the mask in full resolution, please click on the following link.
- MaskView for Thomas Hutchens (May take a few seconds to load. Use command, control, left-click, and center-click buttons to toggle layers. Here are instructions showing how to measure.)
The previous mask design (0.6um contacts) is shown in the MaskView for reference (color blue).
Four days manufacturing lead-time. Includes FedEx next-day shipping. Here are our standard terms of sale.