Chrome Mask for Xu Lab (TC-LED+PD/GRE)
One chrome mask on a 5x5 90mil quartz substrate (2um-flat amorphous fused-silica), 2um CD with 100nm tolerance, 150 registration tolerance to grid, zero defects greater than 5um. Here are our standard terms of sale. To view the mask in full resolution, please click on the following link:
(Here are instructions)
As shown, blue represents dark chrome on the mask. White represents clear quartz. Orientation is chrome-DOWN.