Mask for MIT MSE
One 2.875 x 4.75" chrome mask on a 90mil quartz substrate. Pattern will consist of regular 24-gons with a 10um diameter on a 20um square lattice (the same as Chip 7 on the Test Mask built in January, but a much larger array). 1.25um CD with 100nm tolerance, 0.15um positional accuracy, zero defects greater than 5um. One week lead-time.
To view the mask in full resolution, please click on the following link:
As shown, COLOR represents CLEAR area on the mask and all other color (white) represents opaque chrome.
Price includes FedEx Priority Overnight shipping (DAP-Boston). Unless expressed otherwise, here are our standard terms of sale.