Chrome Reticles for U-Arkansas MUSiC DDNL DI002, 6" Quartz
One bundle of FOUR chrome reticles on 6x6" 250mil amorphous fused-silica (quartz) substrates. Reticles will be compatible with Nikon NSR 2005i8a stepper with custom fiducial marks on the left and right sides. No pellicles (a pellicle is shown for reference in the MaskView).
Reticles will have a 5um dark line as the CD with 100nm tolerance and uniformity.
The tone and orientation of the masks are designated along the lower edge of each mask. In this case, reticles 1-3 will have CLEAR features on dark fields and the METAL1 reticle will have DARK features on a bright field. Orientation is shown chrome-DOWN, looking through the glass.
For a look at the mask layout in full resolution, please click on this link:
MaskView for MUSiC DDNL DI002 Reticles
Please review the material and let me know if you have any questions or if any changes are needed. If you are satisfied with the proposal, simply place your order to begin fabrication.
Delivery in about one week. Shipping is included. Here are our standard terms of sale.