Custom Reticle Layout for ASML
In addition to 1X masks for contact and proximity aligners, we also build reticles for 4X and 5X steppers. This client gave us a gds-II design file consisting of four layers. Complying with the reticle design guide for this specific stepper type, we laid out the four layers on a single reticle in both negative and positive tones and added the appropriate ASML alignment fiducials and barcode. The client placed the order on a Thursday and the completed 6" quartz reticle arrived on Tuesday. The reticle had a 2.5um contact as the critical dimension which measured within 43nm of the nominal value.
If you need help with your reticle layout, just ask. As long as we know your stepper make and model, we can help you with the appropriate fiducials, marks, barcodes, pellicles, stepper job, and composition.
At PhotomaskPORTAL, we help you make masks.
Gilbert De Guzman
8/11/2016 07:06:13 pm
How about masklayout constructed from Autocad FILE and verified by customized design automation software How can I proceed from there
8/14/2016 02:37:14 pm
Hi Gilbert. Simply upload your DWG or DXF file and tell us the orientation (should the mask text read correctly chrome-up or chrome -down) and tone (do your polygons represent clear or dark area on the mask) for each mask. Then we will send you our proposal to review and purchase. Email me directly if you have any questions. And thanks!
11/4/2022 05:47:42 pm
11/7/2022 04:13:27 pm
Mr Jim Carrol kindly forward me your email address
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