Custom Reticle Layout for ASML

In addition to 1X masks for contact and proximity aligners, we also build reticles for 4X and 5X steppers. This client gave us a gds-II design file consisting of four layers. Complying with the reticle design guide for this specific stepper type, we laid out the four layers on a single reticle in both negative and positive tones and added the appropriate ASML alignment fiducials and barcode. The client placed the order on a Thursday and the completed 6" quartz reticle arrived on Tuesday. The reticle had a 2.5um contact as the critical dimension which measured within 43nm of the nominal value.

If you need help with your reticle layout, just ask. As long as we know your stepper make and model, we can help you with the appropriate fiducials, marks, barcodes, pellicles, stepper job, and composition.

At PhotomaskPORTAL, we help you make masks.